the Gertrude E. and John M. Petersen Institute of NanoScience and Engineering (PINSE) fosters collaboration and innovation for members of the University community, as well as researchers throughout the region. To support our mission, PINSE
established the Nanoscale Fabrication and Characterization Facility (NFCF) which is designed to support fabrication and characterization of nanoscale materials and structures, and integration of devices at all length scales. The facility
houses advanced equipment with core nano-level (20 nm or below) capability for fabrication and characterization, including electron-beam lithography system, dual-beam system, plasma etching, thin film deposition, TEM, multifunctional scanning
probe station, modular XRD, etc.
Gertrude E. & John M. Petersen Institute of NanoScience and Engineering